Micro Electro Mechanical Systems
MEMS; when using the silicon for other purposes than only as an electronic circuit substrate. An expanding and very interesting field, which is overlapping sensors but is not identical to. Microspeakers is a good example here. The collective term here is usually sensors and actuators.
During the years, many different structures have passed the Mandalon lab as they also need the contact with the rest of the world. The I/O number is usually lower but the alternative production methods sometimes makes the bonding difficult. Quite often the packaging itself is tricky as the functionality puts up boundaries and special solutions are needed.